构成 / 适用领域
▶ Automation overview
① Defect inspection → ② Defect classification → ③ Process line creation (Cut / Depo / Block / Ink) → ④Repair and result judgment
▶ a-Si TFT & LTPS TFT pattern repair
▶ Oxide TFT & LTPO TFT pattern repair
特点 / 功能

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