About Company

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더 나은 디스플레이의 미래를 창조합니다.

이미지

air SEM

Atmospheric Scanning Electron Microscopy analysis in inline process

구성 / 적용분야

▶ SEM (Scanning Electron Microscope) / EDS (Energy Dispersive Spectrometer) / Review Optics

▶ Defect inspection and analysis in the Display inline manufacturing process

▶ Inspection and analysis of defects in semiconductor and secondary battery in-line manufacturing process

특징 / 성능

▶ Inspection/analysis of up to 11th generation mother glass substrate with one SEM column

▶ High-resolution SEM observation and elemental analysis without Pt coating on sample

▶ SEM magnification: up to 100,000 times

▶ SEM resolution: ≤ 10nm

▶ EDS resolution: Mn Peak FWHM ≤ 129eV

▶ EDS elemental analysis detection range: Minimum Carbon (Atomic No.6)