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AOI

Inspection on TFT pattern defects through getting and processing images

Details & Application

▶ Optics unit
-Inspection and defect repair in laser repair optical system unit
-Automatic focus adjustment
-Control and correction of inspection lighting according to the inspection target (design)

▶ Defect inspection
-High-speed inspection available in all area of the panel (PAD, GOA (Gate-On-Array), ACTIVE)

▶ a-Si TFT & LTPS TFT pattern defect inspection

▶ Oxide TFT & LTPO TFT pattern defect inspection

Features & Specification

▶ High speed Inspection and repair

▶ High magnification inspection available (20X, 50X)

▶ Lighting selection according to the inspection object (Design) (Reflective Light / IR Light)

▶ Follow-up inspection of PAD line