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FMM(Fine Metal Mask)

利用激光去除光罩表面异物

Details & Application

▶ Laser & Needle

▶ FPD Mask 制造及清洗工艺

Features & Specification

▶ 去除Mask Pattern表面有机物、无机物异物(Min width : < 1um, Max width : ≤ 50um)

▶ 去除Mask Pattern 间隙异物

▶ 去除Mask Pattern 下面异物