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TFT Pattern不良用Laser 切断, 或者修复破损

Details & Application

▶ 根据工艺选择Laser构成(Wave length, Pulse width & Etc)

▶ Using diodepumped, harmonic solid-state Q-switched lasers for deposition

▶ 修理a-Si TFT & LTPS TFT Pattern

▶ 修理Oxide TFT & LTPO TFT Pattern

Features & Specification

▶ Min. cutting width : < 1um, Max. cutting width : ≤ 50um

▶ 通过选用Slit / GSM的大面积高速矩阵制成技术

▶ 通过选用Pulse width(266nm, 355nm, 532nm, 1064nm)的 按Layer别 Selective cutting

▶ 可追加AOI, Auto Repair