About Company

We create a better display future
through endless R&D and innovation

이미지

air SEM

Atmospheric Scanning Electron Microscopy analysis in inline process

Details & Application

▶ SEM (Scanning Electron Microscope) / EDS (Energy Dispersive Spectrometer) / Review Optics

▶ Defect inspection and analysis in the Display inline manufacturing process

▶ Inspection and analysis of defects in semiconductor and secondary battery in-line manufacturing process

Features & Specification

▶ Inspection/analysis of up to 11th generation mother glass substrate with one SEM column

▶ High-resolution SEM observation and elemental analysis without Pt coating on sample

▶ SEM magnification: up to 100,000 times

▶ SEM resolution: ≤ 10nm

▶ EDS resolution: Mn Peak FWHM ≤ 129eV

▶ EDS elemental analysis detection range: Minimum Carbon (Atomic No.6)